“MEMS Plus” provides you with an Expert Apps Engineer with 20+ year experience to guide you through the design and development of custom reticles, process flow, job creation, process monitoring, alignment marker optimization, and problem solving, always with the goal of bringing your MEMS project to fruition.

SIMAX engineers excel at helping your team of engineers translate their complex MEMS designs into innovative, elegant processes that bring your product to life. Our engineers will train your team to utilize the best and most current problem-solving methods and approaches.

To aid Engineering Project Managers, at the conclusion of your project, Simax Engineers always provide detailed engineering status reports as well as a final report that clearly documents all procedures and processes.

The Simax “MEMS” Plus Package Advantage

Our MEMS package offers a comprehensive set of tools and expert Engineers to ensure your project success. Our team has many years of experience in all aspects of photolithography, from Contact Printers to advanced DUV Steppers, as well as Photoresist Chemistry, Patterning, and Metrology. Simax Engineers have demonstrated their ability to solve complex process problems and develop robust and efficient processes.

The Package Supports the Following Aspects of MEMS Development

• High Aspect Ratio (HAR) imaging of thick photosensitive films
• Robust align marker and leveling techniques applied to thick non-planar substrates
• Overlay matching and stitching for large area die manufacturing with proximity printers, E-beam, and different magnification exposure tools
• Front to backside alignment and double-sided processing
• 3D metrology for process characterization and process monitoring
• Process development using thick substrates and bonded substrates
• Integration of MEMS structures to front-end IC wafers (antennas, coils, resistors)