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About Simax

Simax provides a complete portfolio of engineering services for semiconductor manufacturing equipment and helps customers optimize their lithography equipment for extended use in their fabs or for the use in new and emerging applications. Simax services include pre-owned equipment, engineering services, field support and applications services as well as financial services.

We support steppers and scanners from ASML and Nikon as well as Canon and other manufacturers for wafer sizes of 200mm and below. Simax also provides parts, parts and module repair, system refurbishment, equipment audits and de-installations, all at a very competitive cost.

Our engineering and applications services support long-term use and optimization of lithography equipment anywhere in the world. The combination of first-class support with a cost-efficient operation increases the lifetime value of equipment and production lines, providing exceptional customer value, all resulting in a better Cost of Ownership, positively impacting the bottom line.

Best Solutions

Improving CD Control - Illumination Uniformity

Illumination Uniformity: All exposure tools specify the illumination uniformity as the range in irradiance [power per unit area mw/cm2] across the exposure field at the wafer plane. It is expressed as a percentage.

Reducing overlay errors by isolation and elimination of their sources

Residual error analysis: Simax has developed procedures to evaluate and reduce overlay error for ASML 5500 steppers to significantly increase yields.