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About Simax

Simax provides a complete portfolio of engineering services for semiconductor manufacturing equipment and helps customers to optimize their lithography equipment for new and emerging applications. Simax' services include pre-owned equipment, engineering services, field support and applications services as well as financial services.

We support steppers and scanners from ASML and Nikon as well as Canon and other manufacturers for wafer sizes of 200mm and below. Simax also provides parts, parts and module repair, system refurbishment, equipment audits and deinstallations.

Our engineering and applications services support long-term use and optimization of lithography equipment anywhere in the world. The combination of first-class support with a cost-efficient operation increases the lifetime value of equipment and production lines, providing exceptional customer value.

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Best Solutions

Improving Illumination Uniformity

Photolithographic process engineers are frequently tasked with developing new processes on older exposure tools, this can be challenging due to the tool's degradation due to age. CD uniformity across the exposure field is one such challenge. Gray filters are a corrective filters designed to improve the illumination uniformity and the CD uniformity.

Full Field Dose to Clear Technique

A significant part of a process engineer’s job is to develop simple and effective monitors that employ minimal non-productive equipment time - Dose To Clear or DTC is one such test.

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